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RecordNumber
993
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Author
Bao, Min-Hang
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Title
Analysis and design principles of MEMS devices
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Author Statement
by Minhang Bao
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Publication
Elsevier
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Publication Year
2005
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Collation
xii, 312 p. ill. 25 cm
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Notes
Includes bibliographical references and index
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Subject
Microelectromechanical systems
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Link To Document :
