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RecordNumber
687
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Title
Enabling technology for MEMS and nanodevices
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Author Statement
edited by H. Baltes ... [et al.]
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Publication
Wiley-VCH
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Publication Year
c2004
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Collation
xii, 427 p. ill. 25 cm
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Series
Advanced micro & nanosystems
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Notes
Includes bibliographical references and index
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Subject
Microelectromechanical systems , Microelectronics , Nanotechnology
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ADDED ENTRIES
Baltes, H
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Link To Document :
