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RecordNumber
417
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Title
Laser applications in microelectronic and optoelectronic manufacturing IV 25-27 January 1999, San Jose, California
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Author Statement
Jan J. Dubowski ... [et al.], chairs/editors ; sponsored by AFSOR [i.e. AFOSR]--U.S. Air Force Office of Scientific Research [and] SPIE--the International Society for Optical Engineering.
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Publication
SPIE
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Publication Year
c1999
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Collation
xi, 534 p. ill. (some col.) 28 cm
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Series
SPIE proceedings series
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Notes
Includes bibliographical references and index
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Subject
Microelectronics industry , Lasers , Manufacturing processes , Laser ablation , Optoelectronic devices
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ADDED ENTRIES
Dubowski, J. J. , United States. , Society of Photo-optical Instrumentation Engineers.
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Link To Document :