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RecordNumber
4012
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Author
Lyshevski, Sergey Edward
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Title
MEMS and NEMS systems, devices, and structures
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Author Statement
Sergey Edward Lyshevski
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Publication
CRC Press
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Publication Year
c2002
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Collation
461 p. ill. 25 cm
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Series
Nano- and microscience, engineering, technology, and medicine series
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Notes
Includes bibliographical references and index
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Subject
Microelectromechanical systems
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Link To Document :
