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RecordNumber
3980
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Title
MEMS and MOEMS technology and applications
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Author Statement
P. Rai-Choudhury, editor.
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Publication
SPIE Optical Engineering Press
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Publication Year
c2000
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Collation
xi, 520 p. ill. 27 cm
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Notes
Includes bibliographical references and index
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Subject
Microelectromechanical systems. , Optoelectronic devices.
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ADDED ENTRIES
Rai-Choudhury, P
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Link To Document :
