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RecordNumber
2395
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Title
Distributed large-scale dimensional metrology new insights
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Author Statement
Fiorenzo Franceschini, Maurizio Galetto, Domenico Maisano, Luca Mastrogiacomo, Barbara Pralio
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Collation
xvi, 233 pages illustrations 24 cm
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Notes
Includes bibliographical references (pages 221-229) and index
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Subject
Metrology. , Integrated circuits , Optical measurements.
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ADDED ENTRIES
Franceschini, Fiorenzo,
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Link To Document :
