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RecordNumber
2328
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Title
Handbook of silicon based MEMS materials and technologies
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Author Statement
Veikko Lindroos ... [et al.][electronic resource]
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Publication
William Andrew
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Publication Year
2010
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Collation
1 online resource (1 v.) ill
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Series
Micro & nano technologies
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Notes
Includes bibliographical references and index
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Subject
Microelectromechanical systems , Silicon , Microelectromechanical systems
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ADDED ENTRIES
Lindroos, Veikko , Ohio Library and Information Network
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Link To Document :
