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RecordNumber
2326
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Author
Bahreyni, Behraad
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Title
Fabrication and design of resonant microdevices
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Author Statement
Behraad Bahreyni
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Publication
W. Andrew Inc.
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Publication Year
c2008
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Collation
xiii, 181 p. ill. 27 cm
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Series
Micro & nano technologies
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Notes
Includes bibliographical references and index
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Subject
Microelectromechanical systems , Microfabrication. , Resonance.
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Link To Document :
