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RecordNumber
2200
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Author
Ma, Xu,1983-
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Title
Computational lithography
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Author Statement
Xu Ma and Gonzalo R. Arce.
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Publication
Wiley
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Publication Year
c2010
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Collation
xv, 226 p. ill. 25 cm
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Series
Wiley series in pure and applied optics
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Notes
Includes bibliographical references (p. 217-222) and index.
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Subject
Microlithography , Integrated circuits , Photolithography , Semiconductors , Resolution (Optics)
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ADDED ENTRIES
Arce, Gonzalo R
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Link To Document :
