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RecordNumber
1968
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Author
Kessels, Wilhelmus Mathijs Marie,1973-
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Title
Remote plasma deposition of hydrogenated amorphous silicon plasma processes, film growth and material properties
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Author Statement
Wilhelmus Mathijs Marie Kessels
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Publication
Technische Universiteit Eindhoven
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Publication Year
2000
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Collation
161 P. ill. 25 cm
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Notes
Vita , Summaries in English and Dutch , Includes bibliographical references
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Subject
Plasma engineering
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ADDED ENTRIES
Technische Universiteit Eindhoven
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Link To Document :
