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RecordNumber
19
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Author
Varadan, V. K.,1943-
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Title
Microstereolithography and other fabrication techniques for 3D MEMS
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Author Statement
Vijay K. Varadan, Xiaoning Jiang, and Vasundara V. Varadan.
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Publication
J. Wiley
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Publication Year
c2001
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Collation
xiii, 260 p. ill. 24 cm
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Notes
Includes bibliographical references and index
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Subject
Microelectromechanical systems , Microlithography. , Three-dimensional display systems.
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ADDED ENTRIES
Jiang, Xiaoning. , Varadan, V. V.,
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Link To Document :
