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RecordNumber
1686
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Title
MEMS introduction and fundamentals
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Author Statement
edited by Mohamed Gad-El-Hak
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Edition
2nd ed
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Publication
CRC/Taylor & Francis
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Publication Year
2006
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Collation
1 v. (various pagings) ill. 26 cm
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Series
Mechanical engineering series , The MEMS handbook
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Notes
One of three parts whose previous edition was a published as a single volume , Includes bibliographical references and index
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Subject
Microelectromechanical systems. , Microelectronics. , Nanotechnology.
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ADDED ENTRIES
Gad-el-Hak, Mohamed,
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Link To Document :
