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RecordNumber
1326
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Title
Introduction to VLSI process engineering
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Author Statement
edited by the Society of Chemical Engineers of Japan ; [editor in chief, Yuji Naka]
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Edition
English language ed
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Publication
Chapman & Hall
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Publication Year
1993
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Collation
xiii, 210 p. ill. 24 cm
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Notes
"The English language edition has been translated from the original Japanese publication ... "--T.p. verso. , Includes bibliographical references (p. [201]-204) and index.
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Subject
Integrated circuits , Manufacturing processes
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ADDED ENTRIES
Naka, Yuji, , Kagaku K�ogaku Ky�okai (Japan)
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Link To Document :
