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RecordNumber
64
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Title
Feedback control of MEMS to atoms
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Author Statement
Jason J. Gorman, Benjamin Shapiro, editors.
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Publication
New York : Springer
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Publication Year
, 2012.
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Collation
viii, 384 p. : ill. ; 25 cm
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Notes
Introduction / Jason J. Gorman and Benjamin Shapiro -- Feedback control of particle size distribution in nanoparticle synthesis and processing / Mingheng Li and Panagiotis D. Christofides -- In situ optical sensing and state estimation for control of surface processing / Rentian Xiong and Martha A Grover -- Automated tip-based 2-D mechanical assembly of micro/nonparticles / Cagdas D. Onal, Onur Ozcan, and Metin Sitti -- Atomic force microscopy : principles and systems viewpoint enabled methods / Srinivasa Salapaka and Murti Salapaka -- Feedback control of optically trapped particles / Jason J. Gorman, Arvind Balijepalli, and Thomas W. LeBrun -- Position control of MEMS / Michael S.-C. Lu -- Dissecting tuned MEMS vibratory Gyros / Dennis Kim and Robert T. M
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Index
index
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Biblography
Includes bibliographical references
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Subject
Feedback control systems , Microelectromechanical systems , Microelectronics
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ADDED ENTRIES
AU Gorman, Jason J , AU Shapiro, Benjamin, 1973-
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LC Class
TJ
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LC Number
216
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LC CutterNumber
.F443
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LC Date
2012
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ISBNN
978-1-4419-5831-0
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Link To Document :